Size-dependent effective Young’s modulus of silicon nitride cantilevers
نویسندگان
چکیده
منابع مشابه
Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability
nanocantilevers using electrostatic pull-in instability H. Sadeghian, C. K. Yang, J. F. L. Goosen, E. van der Drift, A. Bossche, P. J. French, and F. van Keulen Structural Optimization and Computational Mechanics (SOCM) Group, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft, Zuid Holland 2628 CD, The Netherlands Electronic Instrumentation ...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2009
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.3152772